Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it,
This is the second of three volumes that comprise the third edition of what was previously published as a one-volume work titled Fundamentals of Microfabrication and Nanotechnology. The volumes in the
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come ne
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this per
Devoted to the investigation of materials behavior and device issues at the micro-, nano-, and molecular level as well as the behavior and interface between micro-, nano-, and molecular devices, this
