Papers originally presented at the symposium on [title] held in Boston, November/December 1989. The contributions are organized into six sections, covering fundamentals/modeling, diagnostics, process-
Papers of the Boston, Mass. meeting, Dec. 1991, on recent research in CVD of refractory metals and ceramics. Sections on in situ diagnostics, microstructure-process-property relationships, and chemi
Chemical vapor deposition is gaining renewed interest in the scientific community especially for synthesizing new materials with tailored chemical composition and physical properties that offer multip
