This book reflects new developments in the modeling and control of piezoelectric cantilevers. The main nonlinearities (hysteresis and creep) of these actuators are explained from a physical point of v
Laser Diode Microsystems provides the reader with the basic knowledge and understanding required for using semiconductor laser diodes in optical microsystems and micro-optical electromechanic systems.
Electroacoustic transducers (EAT) are devices, which transform electric energy to energy of acoustic fluctuations. Principles of action, design of transducers for work in air and water as well as for
The fundamental principle of piezotronics and piezo-phototronics were introduced by Wang in 2007 and 2010, respectively. Due to the polarization of ions in a crystal that has non-central symmetry in m
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration
Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. precision device engineering, sensor and actuator tec
Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transp
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller
Two-phase microchannel cooling is one of the most promising thermal-management technologies for future high-power IC chips. Understanding the boiling process and the two-phase-flow behavior in microch
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology,
This volume addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nano-technology can enhance
This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors require
