Solid-state Physics, Fluidics, and Analytical Techniques in Micro and Nanotechnology

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms.
Topics include:


* Crystallography and the crystalline materials used in many semiconductor devices
* Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
* Single crystal Si properties that conspire to make Si so important
* Optical properties of bulk 3D metals, insulators, and semiconductors
* Effects of electron and photon confinement in lower dimensional structures
* How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
* Metamaterials and how they could make for perfect lenses, changing the photonic field forever
* Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
* Electromechanical and optical analytical processes in miniaturized components and systems
The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.

Historical Note: The Ascent of Silicon, MEMS, and NEMS
Crystallography
Introduction
Bravais Lattice, Unit Cells, and the Basis
Point Groups and Space Groups
Miller Indices
X-Ray Analysis
Reciprocal Space, Fourier Space, k-Space, or Momentum Space
Brillouin Zones
Nothing Is Perfect
Acknowledgments
Appendix 2A: Plane Wave
Equations
Questions
Further Reading
Reference
Quantum Mechanics and the Band Theory of Solids
Introduction
Classical Theory Starts Faltering
Quantum Mechanics to the Rescue
Beyond Schrödinger’s Equation
Silicon Single Crystal Is Still King
Introduction
Si Crystallography
Single-Crystal Structure and Conductivity
Single-Crystal Si Growth
Doping of Si
Oxidation of Silicon
Si-Based Electronic Devices
Physicochemical Properties of Si
Appendix 4A: Some Properties of Error Functions and Complementary Error Functions
Questions
Further Reading
References
Photonics
Introduction
The Nature of Light
Diffraction and Image Resolution
Refraction
Reflectance and Total Internal Reflectance
Light Polarization
Maxwell’s Equations
Beyond Maxwell
Optical Properties of Materials
Light Interaction with Small Particles
Comparing Photons with Electrons—Photonic Crystals
The μ-ε Quadrant and Metamaterials
Lasers
Questions
References
Fluidics
Introduction
Macroscale Laws for Fluid Flow
Breakdown of Continuum Theory in Fluidics
Forces at Interfaces
Mixing, Stirring, and Diffusion in Low Reynolds Number Fluids
Chemical Reactions in Microchambers—Microreactors
Fluid Propulsion
Electrowetting
Centrifugal Fluidic Platform—CD
Fluidics
Scaling in Analytical Separation
Equipment
Acknowledgments
Questions
Further Reading
References
Electrochemical and Optical Analytical Techniques
Introduction
Intermolecular Forces
Electrochemistry
Optical Spectroscopy
Comparison of Optical versus
Electrochemical Sensors
Questions
References