Handbook of Optical Dimensional Metrology

The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques.

Kevin Harding is a principal scientist at GE Research in Niskayuna, New York, where he leads work in optical metrology at the R&D center and provides guidance to a wide range of optical technology projects. Internationally recognized for his work in 3D measurement technology, he has received numerous honors, including the Automated Imaging Association Leadership Award and the SME Eli Whitney Productivity Award. A SPIE fellow, Harding has published over 120 technical papers, taught more than 60 short courses and tutorials, contributed sections to six books, and received over 55 patents.