商品簡介
The 53 papers embrace a diversity of research, development, and manufacturing activities that require rapid thermal and integrated processing techniques. Most deal with processing issues in silicon-based electronics, but some describe novel application. Progress is reported in such areas as evaluation methodology, equipment and process modeling, temperature control, defects and diffusion associated with annealing, and metallizations such as silicidation. Annotation c. by Book News, Inc., Portland, Or.
