商品簡介
The 71 papers allow researchers in various fields to share ideas about the growth of thin films, their texture and structural evolution, phase transformation, characterizing grain boundaries and interfaces, stress analysis, and polycrystalline Si and SiGe films and devices. The specific topics include improving the long-term stability of polysilicon IC-resistors by fluorine doping, the heteroepitaxial growth of a cubic boron nitride single crystal on diamond seed under high pressure, mass transport paths in conventional and highly textured Al-Cu interconnect lines, the high-resolution X-ray reciprocal space mapping of wavy layers, the morphology and texture of chemical-vapor-deposited TiN films, and Read-Shockley boundaries. Annotation c. by Book News, Inc., Portland, Or.
