Written for engineers and researchers working in semiconductor fabrication industries, this book discusses the systematic growth of Si single crystals using standard techniques with add-on layers for specific applications. It is one of the first books to cover the complete evaluation of Si wafers, from sand to useful wafers for device fabrication. The book shows how to evaluate the suitability of Si wafers in VLSI and ULSI processing technology before implementing the highly sophisticated and systematically drawn process methodology.
Golla Eranna obtained his master’s degree from Sri Venkateswara University, Tirupati, India, with a top rank in the field of semiconductor physics. After that, he joined and received his Ph.D from the Indian Institute of Technology (IIT) Madras. Later, he moved to the IIT Kharagpur Microelectronics Centre. Dr. Eranna joined CEERI, Pilani, India, as a scientist and is currently a senior principal scientist. He became a professor under the Academy of Scientific and Innovative Research (CSIR, New Delhi), and regularly lectures on VLSI processing technology. He also maintains a full-fledged semiconductor device fabrication laboratory.
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