Industry experts provide an overview of the mature topic of oxide reliability, which concerns bias-temperature stability, uniformity, interface properties, leakage currents, endurance, and the use of
Solid Oxide Fuel Cell Lifetime and Reliability: Critical Challenges in Fuel Cells presents in one volume the most recent research that aims at solving key issues for the deployment of SOFC at a commer
Proceedings of the San Francisco, Calif. symposium of April-May 1992, on stress and electromigration/modelling, microstructure, metallization for interconnects ..., oxide and device reliability, analy
With the increased complexity of modern integrated circuits, it is important that reliability problems be attacked properly with the appropriate tools. This volume recognizes that almost all reliability problems are materials problems, and helps to put 'reliabilty physics' on a firm scientific foundation. Topics include: electromigration; stress effects on reliability; stress and packaging; metallization; device, oxide and dielectric reliability; new investigative techniques; corrosion.
In this work, the reliability of HfO2 (hafnium oxide) with poly gate and dual metal gate electrode (Ru–Ta alloy, Ru) was investigated. Hard breakdown and soft breakdown, particularly the Weibull
Contains papers from an April 1997 symposium, in sections on megasonic cleaning, SC1 technology, surface preparation and gate oxide reliability, CMP/CMP cleaning, post-etch processing, surface microro
