Metal Oxide Nanostructures As Gas Sensing Devices

Metal Oxide Nanostructures as Gas Sensing Devices explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. This sensor can then be used to create a compact, low-power, handheld device for analyzing air ambience.

The book first covers current gas sensing tools and discusses the necessity for miniaturized sensors. It then focuses on the materials, devices, and techniques used for gas sensing applications, such as resistance and capacitance variations. The author addresses the issues of sensitivity, concentration, and temperature dependency as well as the response and recovery times crucial for sensors. He also presents techniques for synthesizing different metal oxides, particularly those with nanodimensional structures. The text goes on to highlight the gas sensing properties of many nanostructured metal oxides, from aluminum and cerium to iron and titanium to zinc and zirconium. The final chapters deal with existing and future devices that are based on nanostructures.

Miniaturized systems that analyze air ambience need sensors capable of identifying different gaseous species. Exploring state-of-the-art gas sensing devices, this book shows how nanostructured metal oxides are ideally suited for use as gas sensing elements.

G. Eranna is a scientist in the Sensors and Nanotechnology Group at the Central Electronics Engineering Research Institute (CEERI) of the Council of Scientific and Industrial Research (CSIR) in Pilani, India. He earned a Ph.D. from IIT Madras and has authored more than 70 publications. His research interests include MEMS-based micro gas sensors, integrated circuit fabrication technology, CMOS process standardization, solid-state micro gas sensors, MEMS devices and nanostructures, and the development of micro heaters for on-chip utilities.

Introduction
Miniaturized Solid-State Gas Sensors Gas Chromatography–Mass SpectrometryFourier Transform Infrared SpectrometerMiniaturized Solid-State Gas Sensors
Gas Sensing Materials and Devices
Metal Oxide-Based Gas Sensor DevicesTechniques Used for Gas SensingSensor Properties
Advantages of Nanomaterials
Synthesis and Characterization of Nanometal Oxides
Nanostructured Metal Oxides and Gas Sensing DevicesAluminum OxidesBismuth OxidesCadmium OxidesCerium OxidesCobalt OxidesCopper OxidesGallium OxidesIndium OxidesIridium OxidesIron OxidesMolybdenum OxidesNickel OxidesNiobium OxidesTellurium OxidesTin OxidesTitanium OxidesTungsten OxidesVanadium OxidesZinc OxidesZirconium OxidesMixed Oxides
Active Devices Based on NanostructuresDiodes and Schottky DiodesField-Effect Transistors (FETs)FET-Based Gas Sensors
Future Devices and Nanostructured Gas Sensor ArraysFuture Devices and Gas-Sensor ArraysSummary and Conclusions
Appendix: Tables
References
Index