Digital Holography For Mems And Microsystem Metrology

Approaching the topic of digital holography from the practical point of view of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection. The author addresses the field of particle characterization where digital holography has proven its capability for dynamic measurement of particles in 3D for sizing and shape characterization which offers applications in microfluidics as well as crystallization and aerosol detection studies. Other applications covered include micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.

Digital Holography for MEMS and Microsystem Metrology takes a practical applications-based approach yet includesa thorough enough theoretical background to allow users a means of understanding basic concepts & thus identify areas where this technique can be adopted. This ensures its relevance and appeal not only to researchers but also companies who might want to see the potential of such systems for integration into their existing machines and processes.

Anand Asundi, Nanyang Technological University, Singapore
Anand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world.
He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded.

About the Editor.

List of contributors.

Chapter 1 Introduction (A. Asundi).

Chapter 2 Digital Reflection Holography and applications (V.R. Singh and A. Asundi).

2.1 Introduction to digital holography and methods.

2.2 Reflection digital holographic microscopy (DHM) developments.

2.3 3D imaging, static and dynamic measurements.

2.4 MEMS/Microsystems characterization applications.

Chapter 3 Digital Transmission Holography and applications (Qu Weijuan).

3.1 Historical Introduction.

3.2 Foundation of Digital Holography.

3.3 Digital Holographic Microscopy System.

3.4 Conclusion.

Chapter 4 Digital In-line Holography and applications (slima Khanam).

4.1. Back ground.

4.2. Digital in-line holography.

4.3. Methodology for 2D measurement of micro-particle.

4.4. Validation and performance of the 2D measurement method.

4.5. Methodology for 3D measurement of micro-fiber.

4.6. Validation and performance of the 3D measurement methods.

4.7. Summary & conclusions.

Chapter 5 Other Applications.

5.1 Digital Holography Tomography (DHT) (Yu Yingjie).

5.2 High resolution Pulsed Digital Holography (Caojin Yuan and Hongchen Zhai).

5.3 Digital Holographic Interferometry for Phase Distribution Measurement (Jianlin Zhao).

Chapter 6 Conclusion.