商品簡介
This is the second of three volumes that comprise the third edition of what was previously published as a one-volume work titled Fundamentals of Microfabrication and Nanotechnology. The volumes in the set are sold individually. Ten chapters are arranged in sections devoted to lithography (photolithography and next-generation lithographies); pattern transfer with subtractive techniques (dry etching, wet chemical etching and we bulk micromachining, thermal energy-based removing, and mechanical energy-based removing); pattern transfer with additive techniques (physical and chemical vapor deposition, micromolding techniques, and chemical, photochemical, electrochemical, and thermal energy-based forming techniques). The material is attractively presented with color illustrations and pedagogical enhancements (problems, worked examples, extensive references, and a glossary). Madou is affiliated with the U. of California, Irvine--the departments of mechanical and aerospace engineering, biomedical engineering, and chemical engineering and materials science (and also has honorary affiliations with the Indian Institute of Technology, India, and UNIST, South Korea). Annotation c2011 Book News, Inc., Portland, OR (booknews.com)
