商品簡介
Scientists and engineers from a variety of disciplines offer 62 papers, many of them emphasizing the importance of interactions among the different materials and associated interfaces comprising a single structure with dimensions near or below the micrometer scale. They address the adhesion and fracture of thin films, gate-oxide growth and interfaces, semiconductor surface preparation and oxide reliability, gate-oxide degradation, metallization microstructure, texture and reliability, novel measurement techniques, and other topics. Annotation c. by Book News, Inc., Portland, Or.
