商品簡介
This collection of 26 papers from the April 2000 symposium deals with the microstructure and grain evolution of polycrystalline metal films, and stress and mechanical properties of thin films, particularly in regards to the continued miniaturization of circuit devices. Topics include chemical ordering and microstructure of FePd thin films with perpendicular magnetic anisotropy, x-ray probes of magnetic multi-layer structure, room temperature recrystallization of electroplated copper thin films, and Raman spectroscopy. Annotation c. Book News, Inc., Portland, OR (booknews.com)
