Preface to the Reissue ofthe Materials Characterization Series
Preface to Series
Preface to the Reissue of Characterization of Optical Materials
Preface
Contributors
INTRODUCTION
PART 1 INFLUENCE OF SURFACEMORPHOLOGYAND
MICROSTRUCTURE ON OPTICAL RESPONSE
CHARACTERIZATION OF SURFACE ROUGHNESS
1.1 Introduction
1.2 WhatSurfaceRoughnessls
1.3 HowSurfaceRoughness AffctsOpticaIMeasurements
1.4 How Surface Roughness and ScatteringAre Measured
1.5 Characterization ofSelected Surfaces Preface to the Reissue ofthe Materials Characterization Series Preface to Series Preface to the Reissue of Characterization of Optical Materials Preface Contributors INTRODUCTION PART 1 INFLUENCE OF SURFACEMORPHOLOGYAND
MICROSTRUCTURE ON OPTICAL RESPONSE
CHARACTERIZATION OF SURFACE ROUGHNESS
1.1 Introduction
1.2 WhatSurfaceRoughnessls
1.3 HowSurfaceRoughness AffctsOpticaIMeasurements
1.4 How Surface Roughness and ScatteringAre Measured
1.5 Characterization ofSelected Surfaces
1.6 Future Difections CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POIARIZATION-SENSITIVE OPTICAL TECHNIQUES
2.1 Introduction
2.2 Ellipsometry
ExperimentallmplementationsofEllipsometry 29, Analysisof
EllipsometryData
2.3 MicrostructuralDeterminationsfromEllipsometryData
Temperature Dependence ofthe Opticat Properties ofSilicon 34,
Determination ofthe Optical Functions ofGlasses Using SE 35,
SpectroscopicEllipsometryStudiesofSi02/Si 37, Spectroscopic
EllipsometryforComplicatedFilmStrucrures 38, Time-Resolved
Ellipsometry 40, Single-WavelengthReal-TimeMonitoringofFilm
Growth 41, Multiple-WavelengthReal-TimeMonitoringofFilm
Growth 42, Infrared EllipsometryStudies ofFilm Growth THE COMPOSITION, STOICHIOMETRY, AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS
3.1 Introduction
3.2 AspectsofRamanScattering
3.3 III-VSemiconductor Systems
3.4 GroupIVMaterials
3.5 Amorphous and Microcrystalline Semiconductors
ChalcogenideGlasses 60, GroupIVMicrocrystallineSemiconductors
3.6 Summary DIAMOND AS AN OPTICAL MATERIAL
4.1 Introduction
4.2 DepositionMethods
4.3 0pticalPropertiesofCVD Diamond
4.4 Defectsin CVD Diamond
4.5 PolishingCVD Diamond
4.6 X-rayWindow
4.7 Summary PART 2 STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES
MULTIJAYER OPTICAL COATINGS
5.1 Introduction
5.2 Single-LayerOpticalCoatings
OpticaIConstants 90, CompositionMeasurementTechniques
5.3 MultilayerOpticalCoatings
CompositionaIAnalysis 107, SurfaceAnalyticaITechniques 108,
MicrostructuralAnalysis ofMultilayer Optical Coatings
5.4 StabilityofMultilayerOpticalCoatings
5.5 Future Compositional and
MicrostructuralAnalyticaITechniques CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS
6.1 Introduction
6.2 0rigins ofStress
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