商品簡介
This book firstly introduces the pertinent fundamental theory,important material and fabrication process of microelectromechanical systems.Based on these theories,the design rule and important engineering examples are described in detail.Then,many engineering applications for MEMS including the acceleration measurement,the angular speed measurement and the pressuremeasurement are introduced. Finally,finite element method is introduced in order to prove the correctness of the design. This engineering application of simulation includes the static and modalanalysis of the beam,capacitance analysis,ther mal structure analysis of the device and fatigue analysis etc.It can be selected as the reference to the post graduates,und ergraduates and pertinent engineering staff whose research directions are instrumentation science and technology,control science and engineering,mechanical engineering etc．
