Silicon Wet Bulk Micromachining for MEMS

MEMS-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application for the fabrication of simple to complex MEMS structures. Apart from various benefits of wet chemical based bulk micromachining, one of its unique features is the ability to fabricate slanted sidewalls like the 45° walls as micromirrors as well as freestanding structures such as cantilevers and diaphragms. This makes wet bulk micromachining inevitable for the fabrication of structures for myriad applications.

This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It incorporates introductory to advanced concepts and thus would serve as a textbook for undergraduate and graduate-level students as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS.

Prem Pal is associate professor in the Department of Physics, Indian Institute of Technology Hyderabad, India. He obtained his MTech in solid state materials and PhD in MEMS both from the Indian Institute of Technology Delhi, India, in 1999 and 2004, respectively. From July 2005 to June 2006, he was a postdoctoral researcher at Yonsei Microsystems Laboratory, School of Mechanical Engineering, Yonsei University, Seoul, South Korea. Then he worked in the Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya, Japan as COE (Center of Excellence) scientist from July 2006 to March 2008 and as JSPS fellow from March 2008 to March 2010. Dr. Pal has published more than 50 papers in peer-reviewed international journals. He has made outstanding contribution to the area of silicon wet anisotropic etching, especially its applications for the fabrication of MEMS components. His research interests include MEMS technology, MEMS-based sensors, silicon micromachining, and thin films for MEMS.

Kazuo Sato is an emeritus professor at Nagoya University, Japan, and professor at the Aichi Institute of Technology, Japan, since 2012. He received his BS from Yokohama National University, Japan, in 1970 and PhD from the University of Tokyo, Japan, in 1982. He worked with Hitachi Ltd. from 1970 to 1994. He was a professor of Micromachining and MEMS Laboratory, Nagoya University from 1994 to 2012. Prof. Sato started MEMS research in 1983 and published 151 journal papers, 219 conference papers, and 20 books/book chapters on MEMS technologies. His research areas are micro/nano-physics in anisotropic etching and mechanical properties of single-crystal silicon, as well as applied microsystems such as sensors and actuators.