商品簡介
This second volume of a three-volume work describes nonthermal plasma- related processes and devices of commercial interest, for senior undergraduate or first-year graduate students from engineering and physical science disciplines. Workpieces covered include surfaces of solids, fabrics, webs, microelectronic wafers, and other applications found in industrial practice. Fundamentals from materials science, plasma sources, plasma reactor technology, and the plasma physics of industrial processing are treated. Processes described include ion implantation into solids, plasma-aided deposition of thin films, and plasma etching. Appendices list nomenclature, formulae, and conversion factors. The book assumes background on low-temperature plasma physics. Roth teaches electrical engineering at the University of Tennessee-Knoxville. Annotation c. Book News, Inc., Portland, OR (booknews.com)
